Abstract: In order to solve the problems of the ranges of parallel six-axis force sensors, an orthogonal parallel six-axis force sensor was designed. Orthogonal parallel six-axis force sensor had an improvement in configuration based on parallel six-axis force sensors. So a lot of advantages, such as large load capacity and excellent decoupling performance were obtained. However, coupling errors of the orthogonal parallel six-axis force sensors had certain characteristics. Consequently, considering the coupling errors caused by frictions among branches and the orthogonal structures, ameasurement model of the coupling errors was established. Based on the model, relationship among the sensor parameters and outputs of the two types coupling errors was analyzed by numerical examples. Then a prototype of the orthogonal parallel six-axis force sensor was developed. Finally, the experiments were carried out to obtain error distributions and test accuracy. Each force/torque errors in each direction are 0.43%/0.31%, 0.18%/0.68%, 0.80%/1.28%, respectively.

Key words: six-axis force sensor, parallel structure, measurement model, coupling error

摘要： 为解决并联六轴力传感器量程提升受限问题，设计了一种正交构型并联六轴力传感器。正交并联六轴力传感器是基于并联六轴力传感器的一种构型上的改进，具有承载能力强、解耦性能良好的优势，但同时该力传感器的耦合误差输出具有自身的特点。考虑该力传感器测量分支间摩擦以及正交结构自身特点引起的耦合误差输出，建立了正交并联六轴力传感器耦合误差测量模型。基于所建立的测量模型，通过数值算例分析探讨了传感器设计参数与两种耦合误差输出之间的影响关系，据此研制了一种正交并联六轴力传感器。最后对传感器样机进行了实验，得到其误差分布及检验测量精度。实验所得传感器各维力/力矩在各方向误差分别为0.43%/0.31%，0.18%/0.68%，0.80%/1.28%。

关键词: 六轴力传感器, 并联结构, 测量模型, 耦合误差