CLC Number:
XU Zhiqiang1,2;YIN Shaohui3;JIANG Shengqiang1,2;ZHU Kejun1,2. ELID Grinding and CMP Compound Processing Technology for Sapphire Substrates[J]. China Mechanical Engineering.
徐志强1,2;尹韶辉3;姜胜强1,2;朱科军1,2. 在线电解修整磨削与化学机械抛光相结合的蓝宝石基片组合加工技术[J]. 中国机械工程.