Study on Motion Control Way for Acoustic Suspended Particles Inside a Component

Abstract

Abstract:

In order to machine the structure inside a component directly, a new processing method was put forward with the ultrasonic suspension technology. Firstly, a controlled particle motion model was established through theoretical study of ultrasonic suspension, and then a new test system was designed. After some suspended particles' control movement tests, relationship among the suspension forces and particle diameters, channel sizes, transmission thicknesses was obtained. Results show that the proposed method can drive the particles in 3D space moving to any position freely with higher accuracy. The control scheme is feasible and inspiring.

Key words: inner machining, ultrasound suspension, micro particle, motion control

摘要：

为了实现构件内部微小结构的直接加工，提出了利用超声悬浮技术建立内部微粒运动的声悬浮操控加工方法。建立了超声悬浮操控微粒运动模型，设计了试验系统并进行了构件内通道悬浮微粒的运动操控试验，建立了悬浮力与微粒直径、内部通道尺寸、透射厚度的关系。结果表明，提出的方法可以在三维空间内实现悬浮微粒较高速度的跟随移动和较高的运动精度控制，微粒能在构件内部可靠悬浮且连续运动形成运动轨迹。研究结果为直接加工内部结构提供了可行的运动操控方案。

关键词: 内加工, 超声悬浮, 微粒, 运动操控

CLC Number:

O426.9

Wang Yaxing, Wu Liqun, Lin Zhipeng, Ye Miaohong, Zhuang Long. Study on Motion Control Way for Acoustic Suspended Particles Inside a Component[J]. China Mechanical Engineering, 2015, 26(22): 2996-3001.

王亚星, 吴立群, 林志朋, 叶玅宏, 庄龙. 构件内微粒声悬浮操控方法研究[J]. 中国机械工程, 2015, 26(22): 2996-3001.

References

[1]师汉民．从外加工拓展到内加工——加工成形技术的一个新的发展动向[J]．机械工程学报，2003,39(11)：17-22．
Shi Hanmin. Development From Outer Processing to Inner Processing-a New Trend in Shape-forming Technology[J]. Chiness Journal of Mechanical Engineering, 2003, 39(11):17-22.
[2]沐方清，张杨飞．三维微流道系统技术研究[J]．中国电子科学研究院学报，2011,6(1)：20-23．
Mu Fangqing, Zhang Yangfei. Technical Research of 3D Micro-channel System[J]. Journal of CAEIT, 2011, 6(1):20-23.
[3]唐文斌．超声悬浮夹持装置的研究[D]．大连：大连理工大学，2007．
[4]焦晓阳，刘建芳，刘晓论，等．超声驻波悬浮能力特性[J]．吉林大学学报(工学版)，2013,43(2)：340-345．
Jiao Xiaoyang, Liu Jianfang, Liu Xiaolun, et al. Ultrasonic Standing Wave Levitation Ability[J]. Journal of Jilin University(Engineering and Technology Edition), 2013, 43(2):340-345.
[5]Fuhrmann A，Marshall J S，Wu J．Effect of Acoustic Levitation Force on Aerodynamic Particle Removal from a Surface[J]．Applied Acoustics，2013，74(4)：535-543．
[6]King L V．On the Acoustic Radiation Pressure on Spheres[J]．Proc．R．Soc．London，Ser．A，Math．Phys．Sci．，1934，147(861)：212-240.
[7]Yosioka K, Kawasima Y. Acoustic Radiation Pressure on a Compressible Sphere[J]. Acustica, 1955, 5(3): 167-173.
[8]Takayuki H,Yoichi O,Jun R.Three-dimensional Noncontact Manipulation by Opposite Ultrasonic Phased Arrays[J].Japanese Journal of Applied Physics, 2014，53：07KE077SI.
[9]杨贤龙. 多晶硅表面超声驻波制绒方法研究[D].杭州: 杭州电子科技大学, 2014.
[10]罗斯 J L.固体中的超声波[M].何存富，吴斌，王秀彦，译.北京：科学出版社，2004.

[1]	Zhuang Long, Wu Liqun, Du Xibiao, Zhang Linan. Approach to Arbitrary Transportation of Suspended Particles Based on Ultrasonic Composite Field [J]. China Mechanical Engineering, 2015, 26(22): 3040-3045,3050.
[2]	Cheng Xin1;Wu Huachun1;Hu Yefa1;Zhou Yunfei2. Distributed Memory Mechanism in Parallel Multiprocessor Motion Control System [J]. China Mechanical Engineering, 2014, 25(8): 1041-1046.
[3]	Song Xiaochun1;Chen Yu1;Xu Zhengwang1;Wu Ying2. Path Planning and Motion Control of an Automatic MFL Inspector for Tank Floors [J]. China Mechanical Engineering, 2014, 25(12): 1634-1638.
[4]	LIN Li-Meng-1, 2, XU Dong-2, 3, HU Yi-2, 3, QIN Cheng-Gang-1, 2, WANG Zhi-Cheng-2, 3, LIU Xiao-Hu-1, 2. Design of Realtime System for a Fieldbus-based Embedded Motion Controller [J]. China Mechanical Engineering, 2013, 24(4): 494-499.
[5]	WANG Feng-1, 2, LIN Hu-2, LIU Feng-1, 2, ZHENG Liao-Mo-2, ZHENG Yi-Lin-1, 2. A Detection Algorithm of Motion Mutation during 3D Cutter Compensation in#br# Five Axis End Milling with a Flat-bottomed Tool [J]. China Mechanical Engineering, 2013, 24(15): 1989-1995.
[6]	DING Liang-Hong, WANG Run-Xiao, FENG Hua-Shan, LI Jun. Brief Analysis of a BigDog Quadruped Robot [J]. China Mechanical Engineering, 2012, 23(5): 505-514.
[7]	SHI En-Xiu-1, HUANG Yu-Mei-1, SHU Cong-Min-2, ZHANG E-Xu-1. A Novel Method of Planning Path for DDWMR [J]. China Mechanical Engineering, 2012, 23(23): 2805-2809.
[8]	LI Cheng, AI Wu, DUAN Chun, CHEN Guo-Pei, XIAO Yi. Research on Non-circular CNC Turning Technology Based on High Response Linear Motor [J]. China Mechanical Engineering, 2012, 23(23): 2869-2874.
[9]	HUANG Wei-Dong-1, 2, BAO Jin-Song-2, XU Wei-Sheng-3, DIAO Hai-Liang-3. Motion Control Strategy Simulation of a Lunar Rover for Slope Travel [J]. China Mechanical Engineering, 2012, 23(20): 2481-2487.
[10]	CHENG Xin-1, 2, ZHOU Yun-Fei-1. Design of Parallel Computing Architecture for Multi-axis Ultra-precise Synchronous Motion Control [J]. China Mechanical Engineering, 2011, 22(18): 2156-2162.
[11]	SHI Xu-Guang, XU Bu-Gong. Implementation of NURBS Interpolation Based on Biarc Numerical Algorithm  [J]. China Mechanical Engineering, 2010, 21(12): 1387-1391.
[12]	NI Jing, BANG Li-Hui, XIANG Tie-Qin. Effective Fault Tolerant Control on Electro Hydraulic Servo Synchro System [J]. China Mechanical Engineering, 2010, 21(11): 1342-1347.
[13]	HE Jun, LIU Wei-Feng, CHEN Gao, WANG Hua-Meng. Optimal Interpolation Period for Stepping Motor Systems [J]. J4, 2009, 20(23): 2811-2815.
[14]	DIAO Huan, XIONG Zhen-Hua, DING Han. Research on Field-bus Protocol and Synchronization Mechanism in Motion Control System Based on IEEE1394 [J]. J4, 2009, 20(23): 2850-2855.
[15]	Yang Liangliang;Zhou Yunfei;Pan Haihong;Luo Fuyuan. Research on Synchronous Mechanism of Step-scan Projection Lithography [J]. J4, 2009, 20(01): 0-4.