Abstract:

Using  the silicon die,a suction casting process  for  fabricating  Zr-based  bulk  metallic  glass(BMG) micro-part  was developed. The  suction casting experiments were  carried out with a vacuum arc melting furnace,and the temperatures of the molten alloy were measured by an infrared camera.It is found that under  1116℃  the  molten  alloy can completely duplicate  the  square  silicon micro-grooves  of  3μmin   width  and  3μm    depth with a  good  surface.Then  silicon dies with multi-cavity
and double-layer  cavity were used in suction casting experiments,and BMG micro-gears of 50μm  in  modulus were fabricated successfully.The hardness and elastic modulus of the micro-parts are 6.49GPa  and  94.9GPa.The results show that suction casting of  Zr-based  BMG  with silicon die is a promising method  for  fabricating micro-parts with  high  precision,good  surface and excellent mechanical property.

Key words: bulk , metallic , glass;suction , casting;silicon die;micro-part

摘要：

基于硅模具提出了一种吸铸成形Zr基非晶合金微零件的方法。采用真空氩弧熔化吸铸炉进行了非晶合金微零件吸铸成形实验,用红外热像仪测量了合金熔液温度，发现合金熔液在1116℃下能够完全复制宽3μm、深3μm的硅方形微槽结构且具有较好的表面形貌。随后分别采用带有多型腔和双层型腔的硅模具进行了吸铸成形实验，成功制备了模数为50μm的非晶合金微齿轮零件，微零件的硬度及弹性模量分别为6.49GPa和94.9GPa。实验结果表明,基于硅模具吸铸成形Zr基非晶合金是一种制备高精度、高表面质量、高性能微零件的有效方法。

关键词: 非晶合金, 吸铸, 硅模具, 微零件