Abstract:

A  surface topography measurement system with vibration compensation was developed  herein  based on the white-light wavelength scanning interferometry.Both of  phase extraction algorithm and phase unwrapping algorithm was  analyzed for the white-light wavelength scanning interferometry.They could be used to modify the nonlinear errors during the acousto-optic tunable filter(AOTF) swept  at low rate.The hardware control module was designed for the vibration compensation.In order to verify the designed system,both of  3-dimensional(3D)  surface topography and the roughness parameter of the standard sample grinding at level 12 were  evaluated under different vibration environments.The results demonstrate that the measurement results  with low frequency vibration are  about two times than those of without vibration.After opening the system vibration feedback,the results  approache to the maximum allowed value.It shows that the proposed method can eliminate the vibration effect in a certain extent.Compared with two dimensional(2D) surface  evaluation  results,3D  surface evaluation can express the measured topography surface comprehensively.

Key words: white-light wavelength scanning interferometry, phase calculation, vibration compensation, surface evaluation

摘要：

研制了一种基于白光波长扫描干涉法的表面形貌抗振反馈测量系统,介绍了白光扫描干涉法的相位提取算法和相位去包裹算法，对声光可调滤光器低速率扫频时产生的非线性误差进行了算法修正，设计了用于振动补偿的DSP硬件控制模块，并搭建了抗振反馈测量系统。在不同振动环境下，对研磨12级的标准样块进行了三维表面形貌测量以及粗糙度参数评定。结果表明,施加低频振源后的粗糙度评定参数大小为未施加任何振源的粗糙度评定参数大小的2倍左右,开启系统振动反馈后，粗糙度评定参数接近最大允许值，说明本测量方法能在一定程度上消除振动噪声的影响，保证测量的顺利进行。二维、三维表面评定结果对比表明，三维表面评定能更全面地表现被测表面的形貌特征。

关键词: 白光扫描干涉, 相位计算, 振动补偿, 表面评定