Study on Dynamic Characteristics of Cu/CuNi Thin-film Thermocouple Based on Theory and Experiment

Abstract

Abstract:

For the characteristic of rapid response, thin-film thermocouples were always utilized to measure transient temperatures. The theoretical analysis of dynamic characteristics plays a significant role in the research of thin-film thermocouples. As the target medium was fluid, one-dimensional and unsteady heat transfer model for Cu/CuNi thin-film thermocouple was introduced herein with the boundary conditions of heat convection which was fabricated by means of magnetron sputtering with thickness of 1μm. After dynamic calibration was carried out by means of quickly throwing method, the response time of the thin-film thermocouple was obtained as 7.89ms, which was close to the theoretical calculation value of 4.28ms. From the results of experimental and theoretical analysis, it can be seen that the heat transfer model is reliable, which lays the foundation for theoretical analysis on improving dynamic characteristics of thin-film thermocouple.

Key words: thin-film thermocouple, dynamic characteristic, heat transfer model, time constant

摘要：

具有快速响应特性的薄膜热电偶非常适用于测量瞬变温度，其动态特性理论分析一直都是研究的重点和难点。以流体为被测对象，提出了以对流换热为边界条件的薄膜热电偶一维非稳态传热模型，并依据此模型模拟Cu/CuNi薄膜热电偶阶跃温度响应，同时利用迅速投掷法对用磁控溅射法制备的热结点厚度为1μm的Cu/CuNi薄膜热电偶进行动态标定。模拟和实验结果都表明薄膜热电偶阶跃响应近似于一阶系统，可以用时间常数来反映动态特性，理论和实测的时间常数分别为4.28ms和7.89ms。从结果可以看出，理论值接近实验值，从而验证了该模型的合理性，为进一步提高薄膜热电偶的动态特性提供了理论基础。

关键词: 薄膜热电偶, 动态特性, 传热模型, 时间常数

CLC Number:

TH81

YANG Li-Gong, DIAO Yuan-Shen, CHEN Hao-Fan, SUN Jin-Xiang. Study on Dynamic Characteristics of Cu/CuNi Thin-film Thermocouple Based on Theory and Experiment[J]. China Mechanical Engineering, 2013, 24(10): 1336-1339.

杨丽红, 赵源深, 陈皓帆, 孙金祥. Cu/CuNi薄膜热电偶动态特性理论与实验研究[J]. 中国机械工程, 2013, 24(10): 1336-1339.

References

[1]Gregg E,Aniolek, Otto J,et al.Thin Film Ther-mocouples for Advanced Ceramic Gas Turbine En-gines[J].Surface and Coatings Technology, 1994,68(12):70-75.
[2]任玲[1],黄凤良[1].薄膜热电偶动态特性标定技术研究现状[J].传感器与微系统,2006,25(10):4-6.
[3]Zhang Xugang,Choi H,Datta A, et al.Design,Fabrication and Characterization of Metal EmbeddedThin Film Thermocouples with Various FilmThicknesses and Junction Sizes [J].Journal of Mi-cromechanics and Microengineering, 2006,16(5):900-

905.
[4]雷敏[1],马勤弟[2].薄膜热电偶的动态特性及动态补偿研究[J].计量学报,1999,20(3):182-186.
[5]马勤弟,雷敏.薄膜热电偶的动态校准及辨识建模[J].仪器仪表学报,1999,20(3):300-302.
[6]陈曦[1],毕军建[2],崔忠伟[3].基于预测误差参数辨识的薄膜热电偶动态校准研究[J].仪器仪表学报,2007(S1).
[7]Serio B, Nika P, Prenel J P.Static and DynamicCalibration of Thin-film Thermocouple by Meansof a Laser Modulation Technique[J].Review of Sci-entific Instruments, 2000, 71(2):155-161.
[8]Cui Yunxian, Yang Deshun,Jia Ying,et al.DynamicCalibration of the Cutting Temperature Sensor ofNiCr/NiSi Thin-film Thermocouple C J J,ChineseJournal of Mechanical Engineering, 2011,24(1):73-77.
[9]曾其勇.化爆材料动态切削温度的薄膜热电偶测量原理及传感器研制[D].大连:大连理工大学,2007.
[10]钱兰.薄膜热电偶动态响应特性的实验研究[J].内燃机学报,1998,16(2):251-252.
[11]朱亚民,张军,崔云先,等.NiCr/NiSi薄膜热电偶温度传感器的研制及有限元模拟[J].仪器仪表与传感器,2008(9):15-17.
[12]杨丽红[1],赵源深[1].基于尺寸效应的Cu／CuNi薄膜热电偶灵敏度研究[J].电子元件与材料,2011,30(11):16-18.
[13]杨世铭,陶文铨.传热学[M].2版.北京:高等教育出版社,2006.

[1]	LIU Tao1,2;HAN Yan1,2;SUN Renfu1,2;ZHAO Dingxuan1,2 . Study on Dynamic Characteristics of Digital Hydraulic Transformers [J]. China Mechanical Engineering, 2021, 32(03): 284-289.
[2]	LIU Junlong1;SUN Dongye1;LIU Xiaojun1;YE Ming2;YOU Yong1. Study on Dynamic Response Characteristic Simulation of EMCVT Actuators [J]. China Mechanical Engineering, 2020, 31(03): 253-260.
[3]	ZHAO Youqun;BAI Yiqiang;YE Chao;DENG Yaoji;XU Han;WANG Qiuwei. Study on Static and Dynamic Characteristics of Mechanical Elastic Wheels [J]. China Mechanical Engineering, 2019, 30(19): 2306-2312.
[4]	XIE Miao;LI Xiaojing. Multi-objective Optimization Design of Support Cylinders for Excavation and Anchor Combined Units [J]. China Mechanical Engineering, 2019, 30(16): 1976-1981.
[5]	ZHU Ge;DONG Shimin;ZHANG Weiwei;ZHANG Junjie;ZHANG Chao. Variable Stiffness Spring Reciprocating Pump Poppet Valves and Their Dynamic Characteristic Simulation [J]. China Mechanical Engineering, 2018, 29(24): 2912-2916.
[6]	ZHANG Yuncun1;TIAN Mengqi2;LI Yabin3. Heat Transfer Model of Ring Forgings with Cracks Based on Transient Heat Transfer [J]. China Mechanical Engineering, 2018, 29(10): 1240-1247.
[7]	ZHU Jianmin;ZHENG Zhouyang;HU Yujia;ZHOU Yanan. Radial Dynamic Characteristic Parameter Identification of Rolling Joints in Ball Screw Feed Systems [J]. China Mechanical Engineering, 2018, 29(04): 441-449.
[8]	YANG Lihua1,2;YANG Kai1;XU Haoliang1;YU Lie1. Analysis on Dynamic Characteristics of Air Bearing over Bit Pattern Media in Hard Disk Drives [J]. China Mechanical Engineering, 2017, 28(17): 2036-2042.
[9]	ZHANG Lijun, ZHAO Xinhui, MA Dongchen, MI Yuxia, WANG Hanxiang, LIU Yanxin. Research on Resistance Type Support Rods of Vertical Axis Wind Wheels [J]. China Mechanical Engineering, 2017, 28(12): 1449-1455.
[10]	LI QiangZHANG ShuoMA LongXU WeiweiZHENG Shuiying. Research on Dynamic Characteristics of Multi-wedge Journal Bearing Based on Fluid-structure Coupling [J]. China Mechanical Engineering, 2017, 28(09): 1050-1055,1117.
[11]	CHEN Jian, DENG Zhiqiang, QIAO Jinhong. Aircraft Hydraulic Booster and Rudder System Modeling and Performance Simulation [J]. China Mechanical Engineering, 2017, 28(07): 800-805.
[12]	ZUO Xiqing, RUAN Jian, LI Sheng, LIU Guowen, SUN Jian. Research on Characteristics of Bourdon Tube 2D Pressure Servo-valve Feedback Equipment [J]. China Mechanical Engineering, 2017, 28(04): 451-455.
[13]	Huang Jun, Yuan Juntang, Wang Zhenhua. Multi-objective Optimization Model for Double-drive Feed System Based on NSGA_Ⅱ Algorithm [J]. China Mechanical Engineering, 2016, 27(24): 3294-3300.
[14]	Wu Jinbo, Song Yuchen. Design and Analysis of Active Heave Compensation System for Offshore Cranes [J]. China Mechanical Engineering, 2016, 27(15): 1989-1996.
[15]	Ma Wei, Jing Yueshuai, Li Jishun, Zou Shengyong, Xue Yujun, Yang Fang. Research on Floating Sheave Active Adjusting Rope Performance in Multi Rope Winding Hoist Using Electro-hydraulic Servo System [J]. China Mechanical Engineering, 2016, 27(14): 1870-1876.