[1]陈培洪[1],王寅[1],黄卫清[1].一种圆筒形压电直线电机的设计及实验研究[J].中国机械工程,2011,22(12):1484-1488.
[2]Yeh R, Hollar S, Pister K S J. Single Mask, Large Force,and Large Displacement Electrostatic Linear Inchworm Motor[J].Microelectromechanical Sys- tems, 2002,11 (4) : 330-336.
[3]Ni Jun, Zhu Zhenqi. Design of a Linear Piezo-mo- tor with Ultra-high Stiffness and Nanoprecision [J]. IEEE/ASME Transactions on Mechatronics, 2000,5(4) : 441-443.
[4]Frank J,Koopmann G H,Chen Weicheng, et al. De- sign and Performance of a High Force Piezoelectric Inchworm Motor[C]//Norman M. Conference on Smart Structures and Integrated Systems. NewportBeach,CA, USA, 1999 : 717-723.
[5]Ro P I, Hubbel P I. Nonlinear Microdynamic Behav- ior of a Ballscrew Driven Precision Slide System [J]. Precision Engineering, 1992,14 (4) : 229-236.
[6]Steinmetz C R. Sub-micron Position Measure- ment and Control on Precision Machine Tools with Laser Interferometer [J]. Precision Engineering, 1990,12 (1) : 12-24.
[7]Takafuji K, Nakashima K. Stiffness of a Ball Screw with Considerationof Deformation of the Screw, Nut and Screw Thread ( Preloaded Double Nut) [J]. JSME International Journal, 1990,3 : 620-626.
[8]Otsuka J,Fukada S, Kawase Y. Ultraprecision Posi- tioning by Leadscrew Drive(lst Report) Funda- mental Study Using a Sliding Screw Ora Ball Screw [J].Precision Engineering, 1992,26 (3) : 231-236.
[9]黄卫清[1],孟益民[1].一种新型非共振压电直线电机的设计[J].中国机械工程,2009(14):1717-1721.
[10]刘建芳[1],杨志刚[1],程光明[1],华顺明[1].压电驱动精密直线步进电机研究[J].中国电机工程学报,2004,24(4):102-107.
[11]张兆成[1],胡泓[1].蠕动式压电直线驱动器的发展及应用[J].微特电机,2009,37(3):56-59.
[12]Zhang Bi,Zhu Zhenqi. Development a Linear Piezo- motor with Nanometer Resolution and High Stiff- ness[J]. IEEE/ASME Transaction on Mechatron- ics, 1997,2(1) :22-29.
[13]Moon C, Lee S, A New Fast Inch-worm Type Acutator with the Robust I/Q Heter-odyne Inter- ferometer Feedback [J ]. Mechatronics, 2006, 16 : 105-110. |