China Mechanical Engineering ›› 2012, Vol. 23 ›› Issue (22): 2676-2680.

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Development of Fuzzy Controller for Precision Positioning of Piezo Actuator

Zhang Jianhua;Ge Hongyu;Li Hongsheng;Teng Fulin   

  1. Nanjing Institute of Technology,Nanjing,211167
  • Online:2012-11-25 Published:2012-11-29
  • Supported by:
    Jiangsu Provincial Natural Science Foundation of China(No. BK2009350);
    Jiangsu Provincial Natural Science Foundation of Higher Education of China(No. 09KJB460005)

实现压电致动器精密定位的模糊控制系统研究

张建华;葛红宇;李宏胜;滕福林   

  1. 南京工程学院,南京,211167
  • 基金资助:
    江苏省自然科学基金资助项目(BK2009350);江苏省高校自然科学基金资助项目(09KJB460005)
    Jiangsu Provincial Natural Science Foundation of China(No. BK2009350);
    Jiangsu Provincial Natural Science Foundation of Higher Education of China(No. 09KJB460005)

Abstract:

Aimming to solve problems in accuracy and reality performance of piezo precision positioning system, a fuzzy method was proposed. Hysteresis and step response model of piezo actuator were built with series experiments, Then, fuzzy controller for piezo actuator was suggested, simulated and achieved with a 32-bit embedded microprocessor, S3C2410. System tests on precision positioning indicate that about the step response, the steady state error is less than 0.1μm, the settling time is less than 3ms and the overshoot is less than 20%; about the sinusoidal response, the displacement error is ranged from -0.24μm to 0.2μm.

Key words: fuzzy control, response, precision positioning, piezo actuator

摘要:

针对压电精密定位系统的精度与实时性问题,提出一种适于压电精密定位系统的模糊控制方法,实现了压电致动器的迟滞特性和阶跃响应的实验建模。设计了压电致动器的模糊控制器,结合仿真结果,实现了基于32位嵌入式处理器S3C2410的压电精密定位模糊控制系统。测试结果表明:系统阶跃响应稳态误差小于0.1μm,调节时间在3ms以内,超调量小于20%;正弦响应误差范围为-0.24~0.20μm。

关键词: 模糊控制, 响应, 精密定位, 压电致动器

CLC Number: