[1]李艳秋.光刻机的演变及今后发展趋势[J].微细加工技术,2003(2):1-5.
[2]Kajiwara K, Hayatu M, Imaoka S, et al. Large Scale Active Micro- vibration Control System Using Piezoelectric Actuators Applied to Semiconductor Manufacturing Equipment[J]. JSME, 1997, 63:3735-3742.
[3]Geng Z J, Haynes L S. Six Degree--of--freedom Active Vibration Control Using the Stewart Platforms[J]. IEEE Transactions on Control System Technology, 1994, 2(1): 45-53.
[4]Geng Z J, Haynes L S. Six-- degree-- of-- freedom Active Vibration Isolation Using a Stewart Platforms Mechanism[J]. Journal of Robotic System, 1993, 10(5):725-744.
[5]晏巨,何晓军.电磁悬浮隔振系统控制方法[J].光电工程,1999,26(4):18-22.
[6]龙志强,郝阿明,陈革,常文森.磁悬浮控制的主动式隔振平台研究[J].宇航学报,2003,24(5):510-514.
[7]张毅[1],杨秀霞[1].基于遗传算法的模糊免疫控制器设计[J].系统仿真学报,2004,16(7):1548-1551.
[8]朱冰莲[1],田学隆[2],宋维杰[1].基于人工免疫系统的医学图像配准[J].仪器仪表学报,2009(7):1416-1419.
[9]Singhc T, Nair S B. An Artificial Immune System for Amultiagent Robotics System [J]. Transactions on Engineering,Computing and Technology, 2005, 6:308-311.
[10]谈英姿,沈炯,吕震中.免疫PID控制器在汽温控制系统中的应用研究[J].中国电机工程学报,2002,22(10):148-152. |