Abstract:

A novel algorithm of four-order profile planning for point-to-point motion and error compensation method were investigated. The characteristics for the applicability of profile planning algorithm and the requirements for time-optimality of the profile were firstly analyzed. Under the consideration of the profile as a whole, the preprocessing and algorithm with time-optimality for four-order profile planning were presented, based on the system dynamics constraints. Also, an approach of switching time roundness was proposed by reducing system dynamics constraints. This approach compensates effectively accuracy losses in the discrete time implementation. Experimental results show the effectiveness and reliability of proposed methods. Practically, these methods have been successfully applied in semiconductor manufacturing equipment.

Key words: point-to-point motion, profile planning, time-optimization, error compensation

摘要：

研究了一种优化超精密点对点运动的4阶轨迹规划算法及其精度补偿方法。首先阐述了超精密轨迹规划具有实用性所必须具备的特征以及实现轨迹时间优化的基本要求。然后以系统动力学为基础，考虑运动轨迹的全过程，提出了一种通过预处理以获得时间优化的4阶轨迹直接规划算法。提出了一种适当降低系统动力学限制的时间圆整方法，有效补偿了该算法在计算机离散实现时所带来的精度损失。通过实例验证了所提算法的有效性和可靠性。

关键词: 点对点运动, 轨迹规划, 时间优化, 误差补偿