超声波键合压力自适应平衡装置设计与实验研究
周利杰, 郝瑞林, 蔡国庆, 刘辉, 宿世界
Design and Experimental Study of an Ultrasonic Bonding Pressure Adaptive Balancing Device
ZHOU Lijie, HAO Ruilin, CAI Guoqing, LIU Hui, SU Shijie
中国机械工程
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2023, (16): 2009
-2015
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DOI: 10.3969/j.issn.1004-132X.2023.16.015
