融合双重注意力机制与并行门控循环单元的晶圆加工周期预测方法
戴佳斌, 张洁, 吴立辉
A Wafer Cycle Processing Time Prediction Method Incorporating Double Attention Mechanism and Parallel GRU
DAI Jiabin, ZHANG Jie, WU Lihui
中国机械工程
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2023, (14): 1640
-1646
.
DOI: 10.3969/j.issn.1004-132X.2023.14.001
