激光辅助水射流加工砷化镓晶片微槽的实验研究
段凌云, 黄传真, 刘盾, 姚鹏, 刘含莲
An Experimental Investigation of Laser Assisted Waterjet Microgrooving of GaAs Wafers
DUAN Lingyun, HUANG Chuanzhen, LIU Dun, YAO Peng, LIU Hanlian
中国机械工程
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2023, (10): 1172
-1183
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DOI: 10.3969/j.issn.1004-132X.2023.10.006
