考虑二元Copula统计量的晶圆制造叠加误差监测
郝澜宇, 周笛, 李艳婷, 潘尔顺
Multivariate Coupled Statistics Monitoring of Wafer Manufacturing Overlay Errors Based on CopulaHAO Lanyu
ZHOU Di, LI Yanting, PAN Ershun
中国机械工程
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2023, (03): 369
-377
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DOI: 10.3969/j.issn.1004-132X.2023.03.014
