细粒度金刚石砂轮超精密磨削硅片的表面质量
王紫光, 刘金鑫, 尹剑, 周平, 沙智华, 康仁科
Surface Quality of Ultra-precision Grinding of Silicon with Fine Diamond Grinding Wheels
WANG Ziguang, LIU Jinxin, YIN Jian, ZHOU Ping, SHA Zhihua, KANG Renke
中国机械工程
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2023, (02): 245
-251
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DOI: 10.3969/j.issn.1004-132X.2023.02.015
