单晶硅的磨削辅助电火花线切割机理研究
贾祯, 李淑娟, 麻高领, 邵伟, 乔畅, 张晨
Research on Cutting Mechanism of A-WEDM of Single-crystal Silicons
JIA Zhen, LI Shujuan, MA Gaoling, SHAO Wei, QIAO Chang, ZHANG Chen
中国机械工程
.
2022, (20): 2459
-2467,2475
.
DOI: 10.3969/j.issn.1004-132X.2022.20.009
|
|
|
