单相压电电机驱动的高精度孔径光阑设计
曹腾, 李晓牛, 王柏权, 温智益, 吴大伟
Design of High Precision Apertures Driven by a Single Phase Piezoelectric Motor
CAO Teng, LI Xiaoniu, WANG Boquan, WEN Zhiyi, WU Dawei
中国机械工程
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2022, (20): 2414
-2419
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DOI: 10.3969/j.issn.1004-132X.2022.20.003
