介电泳效应平面抛光的电极同层布置方式数值仿真与实验
邓乾发, 程军, 吕冰海, 袁巨龙, 王旭, 岑凯迪,
Numerical Simulation and Experiments of SLAEs for Planar Polishing with Dielectrophoresis Effect
DENG Qianfa, CHENG Jun, LYU Binghai, , YUAN Julong, WANG Xu, CEN Kaidi,
中国机械工程
.
2022, (15): 1772
-1779，1793
.
DOI: 10.3969/j.issn.1004-132X.2022.15.002
