超精密气体静压系统节流器法向随机微振动研究
沈小燕;丁佳为;禹静;李东升
Research on Normal Random Micro-vibration of Restrictors in Ultra-precision Gas Static Pressure Systems
SHEN Xiaoyan;DING Jiawei;YU Jing;LI Dongsheng
中国机械工程
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2020, (20): 2429
-2436
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DOI: 10.3969/j.issn.1004-132X.2020.20.005
