脉冲磁场辅助磁性复合磨粒化学机械抛光技术及其加工试验研究
黄亦申, 赵彬善, 黄水泉, 游红武, 许雪峰
Pulse Electromagnetic Field-assisted Chemical Mechanical Polishing Utilizing Magnetic Composite Abrasives Slurry and Its Polishing Performance
Huang Yishen, Zhao Bingshan, Huang Shuiquan, You Hongwu, Xu Xuefeng
中国机械工程
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2014, (9): 1175
-1179,1238
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