基于谐振原理的硅微薄膜弯曲疲劳装置的设计
丁雷;尚德广;张大成;贾冠华;李浩群;
Design of a Micro-scale Silicon Film Bending Fatigue Testing Device Based on the Resonance Principle
Ding Lei;Shang Deguang;Zhang Dacheng;Jia Guanhua;Li Haoqun
J4 . 2008, (3): 330 -334 .