静电层层自组装复合磨粒及抛光液的抛光性能研究
姚伟强, 马国伟, 金清波, 黄亦申, 赵彬善, 许雪峰
Study on Layer-by-layer Electrostatic Self-assembly Composite Abrasives Slurry and Its Silicon Wafer CMP Performance
TAO Wei-Jiang, MA Guo-Wei, JIN Qing-Bei, HUANG Yi-Shen, DIAO Ban-Shan, HU Xue-Feng
中国机械工程
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2013, (6): 742
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