<div> CVD金刚石膜抛光技术综述 </div>

CVD金刚石膜抛光技术综述

焦可如, 黄树涛, 周丽, 许立福

Review of Polishing Technology of CVD Diamond Films

JIAO Ge-Ru, HUANG Shu-Chao, ZHOU Li, HU Li-Fu

中国机械工程 . 2011, (1): 118 -125 .