关键词: 精密直线电机；响应分析；有限元分析；模态试验

Abstract:

The precision double linear motor in high resolution step & scan projection-lithography machine utilized the air-bearings to achieve high-speed and high-precision motion with submicron positioning accuracy. With respect to the effect of the characteristics of gas-solid coupling on motion accuracy of the linear motor,a model of the precision linear motor was established by finite element method.Based on the model，the dynamic response was analyzed by the modal method under different conditions, which the acceleration response curves were obtained in X, Y, Z direction respectively.And the dynamic response was proved with experimental modal, which the natural frequency was obtained.The results of simulation are in agreement with those of the experiment and the deviation is 10% below,thus the model is reasonable and feasible. It is helpful to dynamic optimization design and control design of the precision double linear motor with air-bearing in the future work.

Key words: precision linear motor;response analysis;finite element analysis;modal test