关键词: 微机电系统, 力学性能, 驱动, 微位移检测, 微力检测

Abstract:

This paper firstly presented the recent research situations in the micromechanics testing technique and the problems in characterization of mechanics properties. Then the techniques about actuators, micro displacement sensors, and micro force sensors were discussed and compared respectively as they were main parts in microscale mechanics testing. 

Key words: MEMS, mechanics property, actuator, micro displacement sensor, micro force sensor