差动结构的平面二维时栅位移传感器

中国机械工程

差动结构的平面二维时栅位移传感器

杨继森;牟智铭;李路建;邵争光;田青青

重庆理工大学机械检测技术与装备教育部工程研究中心,重庆，400054

出版日期:2020-06-25 发布日期:2020-07-22
基金资助:
国家自然科学基金资助项目（51205434）；
重庆市科技计划资助项目（cstc2017jcyjAX0400）；
重庆市教委科学技术项目（KJ1709232）；
重庆理工大学研究生创新项目（ycx2018217）

A Planar Two-dimensional Time-grating Displacement Senor with Differential Structure

YANG Jisen;MOU Zhiming;LI Lujian;SHAO Zhengguang;TIAN Qingqing

Engineering Research Center of Mechanical Testing Technology and Equipment，Ministry of Education，Chongqing University of Technology, Chongqing, 400054

Online:2020-06-25 Published:2020-07-22

摘要/Abstract

摘要： 为了解决采用两套高精度一维传感、装置测量二维位移时存在的测量系统复杂、检测同步性难保证和解耦运算复杂等问题，提出了一种基于差动结构的二维感应信号直接解耦方法，用于研究一种平面线圈型二维时栅位移传感器。立足于传统电磁式时栅技术，构建了二维位移直接解耦测量模型，并设计了传感器的基本结构。利用ANSYS Maxwell 建立了传感器三维结构模型并进行了电磁仿真，并对仿真结果进行误差分析和溯源。基于此研制了传感器样机并进行了实验。实验结果表明：样机在79.2 mm×79.2 mm测量范围内，X方向误差为91 μm，Y方向误差为74 μm，可实现二维位移同步检测和直接解耦测量，且测量系统结构简单、体积小，对研究更高性能的二维时栅具有重要参考价值。

关键词: 时栅位移传感器, 差动结构, 平面线圈, 二维位移, 直接解耦测量

Abstract:

Aiming to solve the problems of complex measuring system，difficult to guarantee detect synchronicity and complex decoupling algorithm in two-dimensional displacement measuring using two sets of high-precision one-dimensional sensing devices, a two-dimensional sensing signal direct decoupling method was proposed based on differential structure to study a planar coil type 2D time-grating displacement sensor.A 2D displacement direct decoupling model was constructed and the basic structure of the sensor was designed based on the traditional electromagnetic time-grating technology.The 3D structure model of the sensor was built and the electromagnetic simulation was carried out by ANSYS Maxwell.The error analysis and traceability were performed.Based on this, the sensor prototype was developed and the experiments were performed.The experimental results show that the prototype has errors of 91 μm and 74 μm in X and Y directions respectively in the measurement range of 79.2 mm×79.2 mm.It may realize two-dimensional displacement synchronous detection and direct decoupling, and the measurement system has simple structure and small size, which provides important reference for the research of higher performance two-dimensional time-grating sensors.

Key words: time-grating displacement sensor, differential structure, planar coil, two-dimensional displacement, directly decoupling measurement

中图分类号:

TP212

杨继森;牟智铭;李路建;邵争光;田青青. 差动结构的平面二维时栅位移传感器[J]. 中国机械工程.

YANG Jisen;MOU Zhiming;LI Lujian;SHAO Zhengguang;TIAN Qingqing. A Planar Two-dimensional Time-grating Displacement Senor with Differential Structure[J]. China Mechanical Engineering.

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