基于膜式液压放大的压电驱动器设计与试验

中国机械工程

基于膜式液压放大的压电驱动器设计与试验

王建红1;周浩2;许有熊1;刘娣1

1.南京工程学院自动化学院，南京，211167
2.南京工程学院机械工程学院，南京，211167

出版日期:2017-11-10 发布日期:2017-11-07
基金资助:
国家自然科学基金资助项目(61503180)；
江苏省先进数控技术重点实验室开放基金资助项目(SYKJ201601)；
南京工程学院科研基金资助项目(CKJA201605)
National Natural Science Foundation of China （No. 61503180）

Design and Experiment of Piezoelectric Actuator Based on Diaphragm Type Hydraulic Amplification

WANG Jianhong1;ZHOU Hao2;XU Youxiong1; LIU Di1

1.School of Automation, Nanjing Institute of Technology, Nanjing, 211167
2.School of Mechanical Engineering, Nanjing Institute of Technology, Nanjing, 211167

Online:2017-11-10 Published:2017-11-07
Supported by:
National Natural Science Foundation of China （No. 61503180）

摘要/Abstract

摘要： 为解决叠堆式压电陶瓷输出位移微小的问题，结合液压放大的优点，提出了一种基于膜式液压放大的压电驱动器，并对关键部件——橡胶膜片进行有限元静力学、模态等分析。分析结果表明：橡胶膜片具有足够的安全强度和良好的工作频宽。在此基础上，研制其实物样机，搭建其测控平台，并进行了试验研究。开环试验结果表明：在0～100V电压控制下，所研制的压电驱动器输出位移范围为0～0.24mm，放大比约为5；闭环控制试验结果表明：采用分段PID的驱动器控制效果优于采用常规PID的控制效果，稳态误差约为±0.5μm。

关键词: 液压放大, 压电驱动器, 分段PID, 有限元

Abstract: In order to solve the problems of the stack piezoelectric ceramic minute output displacements, which might not meet the practical applications, a piezoelectric actuator was proposed based on diaphragm type hydraulic amplification and the statics and modal analyses of the rubber diaphragm were analyzed by finite element analysis method. The analysis results show that the rubber diaphragm has sufficient safety strength and good working bandwidth. Then, the physical prototype of a piezoelectric actuator was developed and its control platform was built. Finally, the experimental research on the piezoelectric actuator was done. The open-loop experimental results show that the output displacement range is as 0～24mm under the control voltage of 0~100V and the actual amplification ratio is as 5. The closed-loop control experimental results show that the control effectiveness of the segmented PID is better than the conventional PID ,and the steady-state errors are about ±0.5μm.

Key words: hydraulic amplification;piezoelectric actuator;segmented PID, finite element

中图分类号:

TH137

王建红1;周浩2;许有熊1;刘娣1. 基于膜式液压放大的压电驱动器设计与试验[J]. 中国机械工程.

WANG Jianhong1;ZHOU Hao2;XU Youxiong1; LIU Di1. Design and Experiment of Piezoelectric Actuator Based on Diaphragm Type Hydraulic Amplification[J]. China Mechanical Engineering.

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