关键词: 损伤层深度预测, K9玻璃, 磨削, 表面粗糙度

Abstract: A prediction model of sub surface damage depths for K9 glass was established based on the principles of the indentation tests. In order to obtain the unknown parameters, the grinding tests for K9 glass were carried out. The values of surface roughness were measured by laser scanning confocal microscope, and the morphology of surface and sub surface damage layers was detected by scanning electron microscopy (SEM). The influence laws of process parameters on the surface roughness value, the workpiece surfaces and depths of sub surface damage were analyzed. The influence laws of process parameters on the normal grinding force were analyzed, and the empirical formula for the normal grinding force was established by using multiple linear regression fitting according to the experimental data. Furthermore, the unknown parameters were obtained.  The prediction values are consistent with the experimental data, which indicates that the prediction values are reliable.

Key words: prediction of subsurface damage depth, K9 glass, grinding, surface roughness