关键词: 无损检测, 电场测量, 电场, 仿真, 信号

Abstract:

An EFM nondestructive testing method was presented herein. This method offered a possible route to perform the no-contacting inspection for internal and external defects by detecting the electric field variations outside the current-carrying specimen. The electric field of a current-carrying specimen was simulated, and the signal characteristics of defects were discussed. In the preliminary experiments, a semiconductor material was used as the tested specimen, and a passive coplanar capacitor probe was employed to induce the electric field variations. In the case of high voltage exciting, the probe detected the electric field signals of internal and external defects. The consistency of the simulation and experimental results imply that the EFM method has the potential of inspecting internal and external defects in the metal and nonmetal materials. 

Key words: nondestructive testing, electric field measurement (EFM), electric field, simulation, signal