阳极振动往复运丝微细电解线切割试验研究

中国机械工程 ›› 2014, Vol. 25 ›› Issue (3): 295-299.

阳极振动往复运丝微细电解线切割试验研究

于洽;曾永彬;徐坤;曲宁松;朱荻

南京航空航天大学，南京，210016

出版日期:2014-02-10 发布日期:2014-02-07
基金资助:
国家自然科学基金资助项目(51005120)；江苏省自然科学基金资助项目(BE2010193)；国防基础科研计划资助项目(A2520110001)

Research on Anode Vibration and Wire Electrode Travelling in Micro Wire Electrochemical Machining

Yu Qia;Zeng Yongbin;Xu Kun;Qu Ningsong;Zhu Di

Nanjing University of Aeronautics and Astronautics,Nanjing,210016

Online:2014-02-10 Published:2014-02-07
Supported by:
National Natural Science Foundation of China（No. 51005120）;Jiangsu Provincial Natural Science Foundation of China（No. BE2010193）;National Defense Basic Scientific Research Project（No. A2520110001）

摘要/Abstract

摘要：

电解加工产物的及时输运是微细电解线切割加工中亟待解决的问题。提出通过线电极往复运动和工件低频振动共同强化加工间隙内传质过程来提高微细电解线切割的切缝质量的方法;构建了线电极往复运丝、工件振动的微细电解线切割试验系统;采用正交试验方法，分析了线电极运丝幅值、运丝频率、工件振动幅值和振动频率4个因素对切缝平均宽度和切缝轮廓均匀性影响的主次和趋势，并筛选出了优化的线电极运丝和工件振动参数;采用优化参数加工出了结构清晰、完整的微梁结构。

关键词: 微细电解, 线切割, 运丝, 振动, 正交试验

Abstract:

The transport of electrolysis products in the machining gap was regarded as a problem to be solved in micro wire micro-electrochemical machining. A method was proposed to enhance the mass transport and improve the machining accuracy that the anode was vibrating with low frequency while the wire electrode was travelling in the processing. Experimental system was built. The orthogonal experiment was conducted to optimize the machining parameters, such as the wire electrode traveling amplitude and frequency, vibration frequency and amplitude of the workpiece. In the meanwhile the tends on the width and the homogeneity of the machining slit affected separately by the four machining factors were revealed. A micro-girder structure was successfully fabricated by the optimized parameters.

Key words: micro electrochemical machining, wire cutting, wire electrode travelling, vibration; , orthogonal test

中图分类号:

TG662

于洽, 曾永彬, 徐坤, 曲宁松, 朱荻. 阳极振动往复运丝微细电解线切割试验研究[J]. 中国机械工程, 2014, 25(3): 295-299.

Yu Qia, Zeng Yongbin, Xu Kun, Qu Ningsong, Zhu Di. Research on Anode Vibration and Wire Electrode Travelling in Micro Wire Electrochemical Machining[J]. China Mechanical Engineering, 2014, 25(3): 295-299.

参考文献

[1]Rajurkar K P,Levy G, Malshe A,et al.Micro and Nano Machining by Electro-physical and Chemical Processes[J].Annals of the CIRP,2006,55(2):643-666.
[2]孔祥东,张玉林,宋会英,等. 微机电系统的微细加工技术[J].微纳电子技术,2004(11):32-38.
Kong Xiangdong,Zhang Yulin,Song Huiying, et al.MEMS Micro-processing Technologies[J]. Micronanoelectronic Technology, 2004(11):32-38.
[3]Schuster R,Kirchner V,Allongue P, et al. Electrochemical Micromachining[J].Science,2000,289 (5476):98-101.
[4]Kim B H,Na C W,Lee Y S, et al. Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid[J]. CIRP Annals-Manufacturing Technology ,2005,54(1):191-194.
[5]Shin H S,Kim B H,Chu C N. Analysis of the Side Gap Resulting from Micro Electrochemical Machining with a Tungsten Wire and Ultrashort Voltage Pulses[J]. Micromech. Microeng.,2008,18(7):1-6.
[6]王少华,朱荻,曲宁松,等. 微细缝结构电解加工研究[J].中国机械工程,2009,20(8):965-970.
Wang Shaohua,Zhu Di,Qu Ningsong,et al. Investigation for Wire Electrochemical Machining of Micro Grooves[J]. China Mechanical Engineering, 2009,20(8):965-970.
[7]王昆,朱荻,张朝阳.微细电解线切割加工的基础研究[J].中国机械工程,2007,18(7):833-837.
Wang Kun,Zhu Di,Zhang Zhaoyang.Foundational Investigation on Wire Electrochemical Micro-machining(WEMM)[J]. China Mechanical Engineering, 2007,18(7):833-837.
[8]王昆,朱荻,王明环. 微米尺度线电极的电化学腐蚀法制备[J]. 机械科学与技术,2006,25(9):1073-1075.
Wang Kun, Zhu Di, Wang Minghuan. Fabrication of Micrometer Scale Wire Electrodes Using Eletrochemical Etching[J]. Mechanical Science and Technology, 2006, 25(9): 1073-1075.
[9]王少华,朱荻. 微尺度线电极电解加工[J].航空学报,2009,30(9):1788-1794.
Wang Shaohua, Zhu Di. Micro Wire Electrode Electrochemical Machining[J]. Acta Aeronautica et Astronautica Sinica, 2009, 30(9): 1788-1794.
[10]马晓宇,李勇,吕善进,等.加工间隙内电解产物对微细电解加工的影响分析[J].电加工与模具,2008,6:31-35.
Ma Xiaoyu,Li Yong,LüShanjin,et al. Influence of Electrolytic Products in Machining Gap on Micro-ECM Process[J]. Electromachining & Mould, 2008,6:31-35.
[11]王明环,朱荻,徐慧宇.微螺旋电极在改善微细电解加工性能中的应用[J].机械科学与技术,2006,25(3):348-351.
Wang Minghuan, Zhu Di, Xu Huiyu.Use of Micro-helix Electrodes in Improving Performance of Micro-ECM[J]. Mechanical Science and Technology, 2006, 25(3): 348-351.
[12]王少华,朱荻,曾永彬,等. 线电极微幅振动电解线切割研究[J].机械工程学报,2010,46(13):172-178.
Wang Shaohua,Zhu Di,Zeng Yongbin,et al. Investigation on Wire Electrochemical Cutting with Micro-tool Vibration[J]. Journal of Mechanical Engineering,2010,46(13):172-178.
[13]朱兵,朱荻,曾永彬,等. 电解线切割加工技术试验研究[J]. 中国机械工程,2010,21(8):963-967.
Zhu Bing,Zhu Di,Zeng Yongbin,et al.Experimental Research on Wire Electrochemical Machining[J]. China Mechanical Engineering, 2010,46(13):172-178.

[1]	梁淑宝, 张培林, 曹建军, 任国全. 基于蚁群优化的提升小波包渐变式阈值降噪方法 [J]. J4, 201016, 21(16): 1964-1969.
[2]	商泽进, 王忠民. 形状记忆合金弹簧振子强迫振动的分岔与混沌 [J]. J4, 201016, 21(16): 1986-1991.
[3]	商鹏, 黄思硕, 刘晓鹏, 杨壮, 刘腾, 张建军. 二维振动辅助微细铣削切削力建模与试验研究[J]. 中国机械工程, 2021, 32(06): 648-657，665.
[4]	宋海生, 王磊, 田学武, 陈志勇. 基于振动控制的后视镜球铰摩擦能耗机理研究[J]. 中国机械工程, 2021, 32(06): 674-680.
[5]	王龙凯, 王艾伦, 金淼, 尹伊君, . 含内阻的拉杆组合转子双稳态振动特性[J]. 中国机械工程, 2021, 32(05): 512-522,564.
[6]	江志农1;王子嘉1;张进杰2;黄翼飞3;茆志伟2. 基于能量算子梯度邻域特征提取的核电应急柴油发电机组故障诊断方法[J]. 中国机械工程, 2021, 32(05): 617-623.
[7]	唐斌, 范志勇, 项载毓, 吴元科, 黄博, 莫继良, . [轮轨磨耗及预测]高速列车制动摩擦块切入端特征对制动界面特性的影响[J]. 中国机械工程, 2021, 32(04): 412-419.
[8]	白小帆;侯书军;李慨;曲云霞. 轴向低频振动辅助皮质骨钻削的钻削力和温升[J]. 中国机械工程, 2021, 32(03): 321-330.
[9]	龙江启1;林坚1;陈先兵2;王子宁2. 通风制动盘结构参数对制动抖动的敏感性[J]. 中国机械工程, 2020, 31(24): 2966-2971.
[10]	沈诚;邹平;康迪;王文杰. 超声振动透镜辅助激光打孔实验研究[J]. 中国机械工程, 2020, 31(21): 2542-2546.
[11]	郭金生1;王峰1;岳程斐2. 基于商用现货的高分辨卫星微振动抑制系统设计[J]. 中国机械工程, 2020, 31(20): 2395-2042，2411.
[12]	沈小燕;丁佳为;禹静;李东升. 超精密气体静压系统节流器法向随机微振动研究[J]. 中国机械工程, 2020, 31(20): 2429-2436.
[13]	赵亭;肖继明;范思敏;杨振朝;杨福杰. TC4钛合金低频振动钻削切屑形态和钻削力研究[J]. 中国机械工程, 2020, 31(19): 2276-2282.
[14]	吴石；朱美文；张添源；刘献礼；李传东. 覆盖件模具拼接特征对球头刀铣削振动的影响 [J]. 中国机械工程, 2020, 31(18): 2143-2152.
[15]	杜进辅, 王峥嵘, 刘凯, 文建爽, 毛锦. 纯电动汽车高速斜齿轮传动振动特性分析[J]. 中国机械工程, 2020, 31(15): 1808-1814.