基于多目标遗传算法的硅微机械电容式麦克风优化设计

中国机械工程 ›› 2011, Vol. 22 ›› Issue (4): 394-397.

基于多目标遗传算法的硅微机械电容式麦克风优化设计

董健;王伟;计时鸣

浙江工业大学特种装备制造与先进加工技术教育部重点实验室,杭州,310014

出版日期:2011-02-25 发布日期:2011-03-15
基金资助:
浙江省自然科学基金资助项目(Y107445)；浙江省重中之重学科开放基金资助项目(20060313)
Zhejiang Provincial Natural Science Foundation of China（No. Y107445）

Optimal Design of Micromachined Silicon Condenser Microphone Based on Multi-objective Genetic Algorithm

Dong Jian;Wang Wei;Ji Shiming

The Key Laboratory of Special Purpose Equipment and Advanced Processing Technology,Zhejiang University of Technology,Hangzhou,310014

Online:2011-02-25 Published:2011-03-15
Supported by:
Zhejiang Provincial Natural Science Foundation of China（No. Y107445）

摘要/Abstract

摘要：

介绍了一种基于多目标遗传算法的硅微机械电容式麦克风优化设计方法。以复合敏感膜参数、底板参数以及敏感膜与底板间距为设计变量,麦克风灵敏度、最大工作电压、工作频率带宽为优化设计目标,采用多目标遗传算法求出Pareto最优解集。在所求出的Pareto最优解集中选择一组最符合设计要求的解作为麦克风的设计参数。



关键词:

硅微机械电容式麦克风, 多目标优化, 遗传算法, Pareto最优解集

Abstract:

A new approach to design micromachined condenser microphone based on multi-objective genetic algorithm was proposed.The parameters of the sandwich diaphragm and the backplate as well as the space among them as the design variables,and the sensitivity and the pull-in voltage and the frequency bandwidth were optimized.A Pareto-optimal set was obtained by

multi-objective genetic algorithms.The set,in accordance with demands of design mostly was chosen as the parameters of microphone from the Pareto-optimal set.

Key words: silicon condenser micromachined microphone, multi-objective optimal design, genetic algorithm, Pareto-optimal set

中图分类号:

TP212

董健, 王伟, 计时鸣.

基于多目标遗传算法的硅微机械电容式麦克风优化设计

[J]. 中国机械工程, 2011, 22(4): 394-397.

DONG Jian, WANG Wei, JI Shi-Ming.

Optimal Design of Micromachined Silicon Condenser Microphone Based on Multi-objective Genetic Algorithm

[J]. China Mechanical Engineering, 2011, 22(4): 394-397.

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