<div>TiAlN/SiO2纳米多层刀具涂层的微观结构和超硬效应研究</div>

中国机械工程 ›› 2011, Vol. 22 ›› Issue (22): 2757-2761.

• 材料工程 • 上一篇下一篇

TiAlN/SiO2纳米多层刀具涂层的微观结构和超硬效应研究

王均涛;刘平;杨丽红;李伟;刘新宽;马凤仓

上海理工大学，上海，200093

出版日期:2011-11-25 发布日期:2011-12-12
基金资助:
上海市科学技术委员会资助项目(08110511600)；上海市教育委员会重点学科建设项目(J50503)

Investigation of Microstructure and Superhardness Effect of TiAlN/SiO2 Tool Nanomultilayers

Wang Juntao;Liu Ping;Yang Lihong;Li Wei;Liu Xinkuan;Ma Fengcang

University of Shanghai for Science and Technology,Shanghai,200093

Online:2011-11-25 Published:2011-12-12

摘要/Abstract

摘要：

通过磁控溅射方法制取了一系列不同SiO2厚度的TiAlN/SiO2纳米多层涂层，并用X射线衍射仪(XRD)、扫描电镜(SEM)、高分辨透射电镜(HRTEM)和纳米压痕仪分别对该涂层的微观结构和力学性能进行了表征和测量。研究表明：当非晶态的SiO2厚度约小于1nm时，SiO2在TiAlN模板作用下转变为晶体结构，并与TiAlN呈共格外延生长，出现超硬效应;当SiO2厚度为0.6nm时，其硬度和弹性模量分别高达37GPa和393GPa;当SiO2厚度超过1nm时，SiO2逐渐转变为非晶结构并且破坏了多层涂层的共格外延生长，硬度随之降低。因此,可以利用该方法制备出机械性能好且耐高温氧化性的刀具涂层，以满足现代切削的需要。

关键词:

超硬效应, TiAlN/SiO2纳米多层涂层, 共格外延生长, 非晶晶化

Abstract:

A series of TiAlN/SiO2 nanomultilayers with various SiO2 layer thicknesses were synthesized by reactive magnetron sputtering. The microstructure and mechanical properties were evaluated by X-ray diffraction (XRD), scanning electron microscopy(SEM),high-resolution transmission electron microscopy(HRTEM) and nano-indentation. The results reveal that, under the template effect of TiAlN layers, amorphous SiO2 is forced to crystallize and grow epitaxially with TiAlN layers when SiO2 layer thickness is below 1nm, and the nanomultilayer appears superhardness effect with the maximum hardness and elastic modulus of 37GPa and 393GPa when SiO2 layer thickness is 0.6nm. As the SiO2 layer thickness exceedes 1nm, SiO2 transforms into amorphous state and breaks the coherent growth of multilayers, resulting in the decrease of hardness and elastic modulus. Therefore cutter protective coatings which possess better mechanical properties and good oxidation resistance at high temperature are synthesized by this mechanism to meet modern cutting.

Key words: superhardness effect, TiAlN/SiO2 nanomultilayer, epitaxial growth, amorphous crystallization

中图分类号:

TG115

王均涛, 刘平, 杨丽红, 李伟, 刘新宽, 马凤仓.

TiAlN/SiO2纳米多层刀具涂层的微观结构和超硬效应研究

[J]. 中国机械工程, 2011, 22(22): 2757-2761.

WANG Jun-Chao, LIU Beng, YANG Li-Gong, LI Wei, LIU Xin-Kuan, MA Feng-Cang.

Investigation of Microstructure and Superhardness Effect of TiAlN/SiO2 Tool Nanomultilayers

[J]. China Mechanical Engineering, 2011, 22(22): 2757-2761.

参考文献

[1]PalDey S, Deevi S C. Single Layer and Multilayer Wear Resistant Coatings of TiA1N a Revie[J]. Material Science and Engineering A, 2003, 342 (1/ 2) : 58-79.
[2]Koehler J S. Attempt to Design a Strong Solid[J]. Phys. Rev. B,1970, 2(2) :547-551.
[3]Yue J L, Li G Y. Microstructure and Mechanical Properties of TiA1N/Si3 N4 Nano-- multilayers Syn- thesized by Reactive Magnetron Sputtering [J]. Journal of Alloys and Compounds, 2009,481 ( 1/2) : 710-713.
[4]Park J K, Baik Y J. Thermal Stability of Nano-- layered Structure and Hardness of TiA1N/SisN4 Nanoscale Multilayered Coating[J]. Materials Let- ters,2009,63(20) : 1674-1676.
[5]Kong Ming,Yue Jian-Ling,Li Ge-Yang,.纳米多层膜中的非晶晶化与超硬效应[J].无机材料学报:1292-1300.
[6]LinCH, TsaiYZ, DuhJ G. Effect of Grain Size on Mechanical Properties in CrA1N/SiNx Multilayer Coatings[J]. Thin Solid Films,2010,518(24):7312- 7315.
[7]Kong M, Wu X Y, Huang B L. Epitaxial Growth and Superhardness Effect of TiN/A1ON Nanomulti- layers Synthesized by Reactive Magnetron Sputte-ring Technology [J]. Journal of Alloys and Com- pounds. 2009, 485(1/2): 435-438.
[8]Oliver W C, Pharr G M. An Improved Technique for Determining Hardness and Elastic Modulus U- sing Load and Displacement Sensing Indentation Experiments[J]. Journal of Materials Research, 1992, 7(6) :1564-1583.
[9]Kim C, Qadri S B, Scanlon M R, et al. Low--di- mension Structural Properties and Microindentation Studies of Ion- beam- sputtered Multilayers of Ag/A1 Films[J]. Thin Solid Films,1994,240(1-2): 52-55.
[10]赵文济[1],董云杉[1],岳建岭[1],李戈扬[1].Si3N4的晶体化和ZrN／Si3N4纳米多层膜的超硬效应[J].物理学报,2007,56(1):459-464.
[11]Yue J L,Yan L, Zhao W J,et al. Crystallization of A1ON and its Effects on the Growth and Hardness of Reactively Synthesized VN/A1ON Nanomulti- layer[J]. Scripta Materislia, 2006,55 (10) : 895- 898.
[12]Yue J L, Zhao W J, Li G Y, et al. Microstructure and Mechanical Properties of VN/SiO2 Nanomulti- layers Synthesized by Reactiv Sputtering[J]. Mate- rials. Letters. ,2008, 62(10/11): 1621-1623.
[13]Madan A,Kim I W, Cheng. S C, et al. Stabilization of Cubic A1N in Epitaxial AIN/TiN Superlattices [J]. Phys. Rev. Lett. ,1997,78(9)..1743-1746.
[14]Zhang Z Y, Lagally M G. Atomistic Processes in the Early Stages of Thin--Film Growth[J]. Sci- ence, 1997,276(5311) :377-383.
[15]Kato M, Mori T, Schwartz L H. Hardening by Spinodal Modulated Structure [J]. Acta. Metall, 1980,28:285-290.
[16]Shinn M,Barnett S A. Effect of Superlattice Layer Elastic Modulus on Hardness [J]. Appl. Phys. Lett. ,1994,64(1) :61-63.
[17]Chu X, Barnett S A. Model of Superlattice Yield Stress and Hardness Enhancements[J]. J. Appl. Phs. , 1995,77(9) ..4403-4411.
[18]Pacheco E S, Mura T. Interaction between a Screw Dislocation and a Bimetallic Interface[J]. J. Mech. Phys. Solids. ,1969,17.. 163-170.

相关文章 0

编辑推荐

Metrics