半固着磨具“陷阱”效应影响因素分析

中国机械工程 ›› 2011, Vol. 22 ›› Issue (20): 2399-2403.

半固着磨具“陷阱”效应影响因素分析

赵萍;王志伟;袁巨龙

浙江工业大学特种装备制造与先进加工技术教育部重点实验室,杭州,310014

出版日期:2011-10-25 发布日期:2011-11-02
基金资助:
国家自然科学基金资助重点项目(50535040)；浙江省自然科学基金资助项目(Y1101095)
Key Program of National Natural Science Foundation of China（No. 50535040）;
Zhejiang Provincial Natural Science Foundation of China（No. Y1101095）

Analysis for 'Trap' Effect Influence Factors of Semi-fixed Abrasive Plate

Zhao Ping;Wang Zhiwei;Yuan Julong

Key Laboratory of Special Purpose Equipment and Advanced Machining Technology，

Ministry of Education,Zhejiang University of Technology,Hangzhou,310014

Online:2011-10-25 Published:2011-11-02
Supported by:

Key Program of National Natural Science Foundation of China（No. 50535040）;
Zhejiang Provincial Natural Science Foundation of China（No. Y1101095）

摘要/Abstract

摘要：

以抛光后无表面损伤的单晶硅片为试件，以表面粗糙度Ra为指标,对半固着磨具的“陷阱”效应进行试验分析，讨论大颗粒浓度及尺寸、磨具硬度、加工载荷、磨具转速对“陷阱”效应的影响。研究结果表明：对一定尺寸的大颗粒，当大颗粒数量不超过临界值时，大颗粒可全部陷入，“陷阱”效应发挥;当大颗粒尺寸较大、磨具硬度较高、加工载荷较大时，不利于“陷阱”效应发挥。

关键词:

半固着磨具, &ldquo, 陷阱&rdquo, 效应, 大颗粒, 表面粗糙度

Abstract:

Semi-fixed abrasive machining experiments were performed to analyze the influences of several factors on the 'trap' effect of SFAP.These influencing factors were as the concentration and size of large grains, hardness of SFAP,processing load and rotating speed of SFAP.The workpieces were damage-free single crystal silicon after polishing, its surface roughness Ra after semi-fixed machining was measured and adopted as the parameter of evaluating the extent of 'trap' effect.These work indicates that for large grains with certain size, when the number of large grains is not more than the threshold one, all large grains embed into SFAP.The 'trap' effect of SFAP decreases with the increase of large grain size, SFAP hardness, or processing load. 

Key words: semi-fixed abrasive plate(SFAP);trap effect;large grain, surface roughness

中图分类号:

TG74

赵萍, 王志伟, 袁巨龙.

半固着磨具“陷阱”效应影响因素分析

[J]. 中国机械工程, 2011, 22(20): 2399-2403.

DIAO Ping, WANG Zhi-Wei, YUAN Ju-Long.

Analysis for 'Trap' Effect Influence Factors of Semi-fixed Abrasive Plate

[J]. China Mechanical Engineering, 2011, 22(20): 2399-2403.

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链接本文: http://www.cmemo.org.cn/CN/

http://www.cmemo.org.cn/CN/Y2011/V22/I20/2399

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