中国机械工程 ›› 2010, Vol. 21 ›› Issue (24): 2952-2956.

• 信息技术 • 上一篇    下一篇

基于近场声悬浮的非接触式直线型压电作动器

孙运涛;陈超
  

  1. 南京航空航天大学,南京,210016
  • 出版日期:2010-12-25 发布日期:2010-12-30
  • 基金资助:
    国家自然科学基金资助项目(10604032,50735002)
    National Natural Science Foundation of China(No. 10604032,50735002)

Non-contact Linear Piezoelectric Actuator Based on Near-field Acoustic Levitation

Sun Yuntao;Chen Chao
  

  1. Nanjing University of Aeronautics and Astronautics,Nanjing,210016
  • Online:2010-12-25 Published:2010-12-30
  • Supported by:
    National Natural Science Foundation of China(No. 10604032,50735002)

摘要:

针对近场声悬浮(NFAL)传输在航空航天、高纯度材料加工以及微机电系统装配操作等领域的良好应用前景,设计出了非接触式直线型压电作动器。该作动器依靠兰杰文振子的振动,产生高声强声场来悬浮并驱动物体沿行波方向运动。先通过动力学分析和结构设计,试制出了一对兰杰文振子样机,并通过实验获得了其动态特性参数;然后,成功制造出了基于NFAL的非接触式直线型压电作动器,此作动器可悬浮传输的最大单位面积质量为3.06g。

关键词:

Abstract:

Realizing the good prospect of NFAL in application in the fields of aerospace engineering, material science, production line of high purity material and micro-machine assembly, a non-contact linear piezoelectric actuator was designed herein. This actuator, which operated by the acoustic field with high intensity generated by vibration of a Langevin-type transducer, can suspend and transport the objects along the direction of the traveling wave of linear plate. Firstly, through dynamic analysis and structure design, a couple of Langevin-type transducers were manufactured and their dynamic characteristic parameters were measured. Finally, non-contact linear piezoelectric actuator based on NFAL was produced successfully, the maximum unit area weight of which can suspend and transport is 3.06g.

Key words: acoustic levitation, near-field acoustic levitation(NFAL), piezoelectric, linear actuator

中图分类号: