压电, 惯性, 摩擦, 三自由度

Based on controlling the orderly changes of friction force between the moving mechanism bodies and the supporting faces in mechanical way, a new type 3-DOF inertial moving mechanism by using piezoelectric stack as the driver was presented. The working principles of the moving mechanisms were discussed and the structure model was designed.The prototype of the inertial moving mechanism was manufactured,some experiments of the mechanism were carried out and the curves of movement steplength affected by the friction coefficient,loads,driving voltage were obtained.The experimental results show the moving mechanism has good movement and loading performance. It can be applied in the field of precision engineering, such as micromanipulation,precision driving,precision positioning and optical engineering, etc.

piezoelectricity, inertial, friction, 3-DOF