关键词: 位置传感器, 辐照环境, 压力响应, 预测模型, 正交试验

Abstract: The electronic components were involved in the sensitive elements and conversion elements of the general pneumatic position sensors, which might not be applied to the irradiation environments. Aiming at the application problems of position sensors under irradiation environments, a scheme of new pneumatic position sensor was proposed to judge whether the measured part reached the preset position by detecting the numerical changes of the flow field in the corresponding position. The scheme had the problem of lagging pressure response, which led to the lagging phenomenon of the position feedback of the tested parts, so it was crucial to accurately estimate the position compensation of the sensors and improve the detection precision on the positions. The internal flow of the pneumatic position sensors was analyzed and the prediction model of the pressure response was established. By orthogonal tests, the sensitivity of each engineering variables to the coefficients in prediction model and response time was revealed and the coefficients were further fitted by simulation. The results show that the prediction model may meet the requirements of the lagging position when the maximum error of response time is within 0.01 s and the repeated positioning errors of the prediction model are less than 1 mm when the maximum velocity is as 100 mm/s.

Key words: position sensor, irradiation environment, pressure response, prediction model, orthogonal test