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ISSN 1004-132X
CN 42-1294/TH
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中文
Simulation Analysis and Process Study of Scribing Processes for GaAs Cleavage Processing
ZHANG Qingzheng1, JIANG Chen1, GAO Rui2, JIANG Jinxin1
China Mechanical Engineering . 2024, (
12
): 2203 -2210 . DOI: 10.3969/j.issn.1004-132X.2024.12.013
