High-resolution Microscope Motion Control Based on Adaptive Finite-time Control Strategy
YU Shengdong1, 2, 3, LI Xiaopeng1, 2, YANG Sipeng2, WU Hongyuan1, 2, HU Wenke1, 2, CAI Bofan1, 2, MA Jinyu3
China Mechanical Engineering
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2024, (09): 1688
-1697
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DOI: 10.3969/j.issn.1004-132X.2024.09.019
