Design and Laser Etching of Embedded Microchannels on AlN Substrate
MA Yupu, WEI Tao, WANG Li, ZHAO Junyi, ZHANG Xinlei, CHEN Ni, LI Liang, HE Ning
China Mechanical Engineering . 2023, (20): 2496 -2503 .  DOI: 10.3969/j.issn.1004-132X.2023.20.013