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ISSN 1004-132X
CN 42-1294/TH
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中文
Multivariate Coupled Statistics Monitoring of Wafer Manufacturing Overlay Errors Based on CopulaHAO Lanyu
ZHOU Di, LI Yanting, PAN Ershun
China Mechanical Engineering . 2023, (
03
): 369 -377 . DOI: 10.3969/j.issn.1004-132X.2023.03.014
