Surface Quality of Ultra-precision Grinding of Silicon with Fine Diamond Grinding Wheels
WANG Ziguang, LIU Jinxin, YIN Jian, ZHOU Ping, SHA Zhihua, KANG Renke
China Mechanical Engineering . 2023, (02): 245 -251 .  DOI: 10.3969/j.issn.1004-132X.2023.02.015

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