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ISSN 1004-132X
CN 42-1294/TH
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中文
ELID Grinding and CMP Compound Processing Technology for Sapphire Substrates
XU Zhiqiang1，2;YIN Shaohui3;JIANG Shengqiang1，2;ZHU Kejun1，2
China Mechanical Engineering . 2018, (
11
): 1310 -1315 .
