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ISSN 1004-132X
CN 42-1294/TH
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中文
Calibration and Uncertainty Estimation of One-dimensional Reference Grating Using a Metrological Atomic Force Microscope
HUANG Jiang-Xian, YUAN Dan, YOU Huan-Jie
China Mechanical Engineering . 2012, (
5
): 531 -536 .
