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ISSN 1004-132X
CN 42-1294/TH
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中文
Ultra-precision Grinding Technology and Grinder of Silicon Wafers
SHU Xiang-Long, KANG Ren-Ke, DONG Zhi-Gang, GUO Dong-Meng
China Mechanical Engineering . 2010, (
18
): 2156 -2164 .
