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ISSN 1004-132X
CN 42-1294/TH
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中文
Analysis of Resist’s Flow Behavior during Micro Imprinting
WEN Ju-Yang, WEI Zheng-Yang, XIONG Xiao-Dong, DU Jun, LEI Bing-Heng
China Mechanical Engineering . 2010, (
04
): 463 -469 .
