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ISSN 1004-132X
CN 42-1294/TH
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中文
Measurement System for MEMS Microstructures Outofplane Dynamic Deformation with Environmental Control Facility
XIE Yong-Jun, SHI Tie-Lin, LIU Shi-Yuan, TUN Jian-Kang
China Mechanical Engineering . 2010, (
1
): 67 -70 .
