Tribological Properties and Mechanism of Nanostructured Carbon Films under Coupling Effect of Temperature and Electric Field

doi:10.3969/j.issn.1004-132X.2026.01.004

Abstract

Abstract:

The nanostructured carbon films including amorphous carbon films and graphene nanocrystalline carbon films were prepared on SiO₂ substrates. A self-designed reciprocating tribometer capable for applying coupled multi-physical fields was employed to investigate the tribological properties of the different nanostructured carbon films under the coupling effect of temperature and electric field. At room temperature， the electric field was the dominant factor for affecting the friction coefficient of nanostructured carbon films. When the temperature of tribopair was 200 ℃， temperature became the main influencing factor. Under the coupling effects of temperature and electric field， the structured evolution to graphitic-like structure leads the reduction of friction coefficient of amorphous carbon film. While the nanostructure of graphene nanocrystalline carbon film is stable， but the aggravated wear results in significant fluctuations of friction coefficient.

Key words: carbon film, tribological property, nanostructure, temperature, electric field

摘要：

在SiO₂基体上分别制备了纳米结构（非晶及石墨烯纳晶）碳膜，利用自主设计的多物理场耦合往复式摩擦学实验装置，研究了不同纳米结构的碳膜在温度电场耦合作用下的摩擦学特性。室温下，纳米结构碳膜摩擦因数的主要影响因素为电场；摩擦副温度为200 ℃时，纳米结构碳膜摩擦因数的主要影响因素为温度。温度电场耦合作用下，非晶碳膜的纳米结构向纳晶结构转化，摩擦因数减小；石墨烯纳晶碳膜结构稳定，但碳膜磨损加剧导致摩擦因数波动较大。

关键词: 碳膜, 摩擦学特性, 纳米结构, 温度, 电场

CLC Number:

TH117.1

YU Zhimin, CHEN Lei, FAN Xue. Tribological Properties and Mechanism of Nanostructured Carbon Films under Coupling Effect of Temperature and Electric Field[J]. China Mechanical Engineering, 2026, 37(1): 30-39.

余植敏, 陈磊, 范雪. 温度电场耦合下纳米结构碳膜的摩擦学特性及机理[J]. 中国机械工程, 2026, 37(1): 30-39.

Figures/Tables 18

Tab.1 Preparation parameters of nanostructured carbon films by divergent ion irradiation

参数		数值	参数	数值
基片材料		P型SiO₂	基片尺寸/mm	25×25
工作气体		氩气	工作气压/Pa	0.07
靶材偏压/V		$-$ 500	基片偏压/V	$-$ 5
线圈电流/A	左	32	微波功率/W	350
	中	34	微波功率/W	350
	右	0	沉积时间/ min	50

Tab.1 Preparation parameters of nanostructured carbon films by divergent ion irradiation

参数		数值	参数	数值
基片材料		P型SiO₂	基片尺寸/mm	25×25
工作气体		氩气	工作气压/Pa	0.07
靶材偏压/V		$-$ 500	基片偏压/V	$-$ 5
线圈电流/A	左	32	微波功率/W	350
	中	34	微波功率/W	350
	右	0	沉积时间/ min	50

Tab.2 Preparation parameters of nanostructured carbon films by closed electron irradiation

参数		数值	参数	数值
基片材料		P型SiO₂	基片尺寸/mm	25×25
工作气体		氩气	工作气压/Pa	0.07
靶材偏压/V		$-$ 500	基片偏压/V	50
线圈电流/A	左	40	微波功率/W	256
	中	40	微波功率/W	256
	右	48	沉积时间/min	25

Tab.2 Preparation parameters of nanostructured carbon films by closed electron irradiation

参数		数值	参数	数值
基片材料		P型SiO₂	基片尺寸/mm	25×25
工作气体		氩气	工作气压/Pa	0.07
靶材偏压/V		$-$ 500	基片偏压/V	50
线圈电流/A	左	40	微波功率/W	256
	中	40	微波功率/W	256
	右	48	沉积时间/min	25

Fig. 1 Schematic diagram of temperature and electric field coupled tribometer

Fig.2 Plan-view TEM images and XPS spectrum of C 1s of nanostructured carbon films

Tab.3 Test results of sheet resistance for different nanostructured carbon films

基片偏压/V

薄膜厚度/nm

方块电阻/

（kΩ/sq）

电阻率/

（10 $- 4$ Ω·m）

-

Tab.3 Test results of sheet resistance for different nanostructured carbon films

基片偏压/V

薄膜厚度/nm

方块电阻/

（kΩ/sq）

电阻率/

（10 $- 4$ Ω·m）

-

115

1.61

1.85

115

0.72

0.83

Fig.3 Surface temperature of nanostructured carbon films with different electric fields under room temperature

Fig. 4 Friction curves and average friction coefficient curves of nanostructured carbon films with different electric fields under room temperature

Fig.5 Friction coefficient curves of nanostructured carbon films under four temperature and electric field conditions

Fig. 6 Friction curves and average friction coefficient curves of nanostructured carbon films with different electric fields under temperature of 200 ℃

Fig.7 Optical images of transfer films with different electric fields under room temperature

Fig.8 Raman spectra of transfer films at a current of 0.07 A under room temperature

Fig.9 Optical images of wear tracks on the nanostructured carbon films with different electric fields under room temperature

Fig.10 Optical images of transfer films with different electric fields under temperature of 200℃

Fig.11 Raman spectra of transfer films with different electric fields under temperature of 200 ℃

Fig.12 Optical images of wear tracks on the nanostructured carbon films with different electric fields under temperature of 200 ℃

Fig.13 Plan-view TEM images of amorphous carbon film under different conditions

Fig.14 Raman spectra of nanostructured carbon films under different conditions

Fig.15 Friction mechanisms of nanostructured carbon films under the coupling effect of temperature and electric field （I=0.07 A）

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