基于A-Zernike矩的精密运动平台定位误差校准方法
邓书朝, 胡奥康, 童宝宏, 郑近德, 王璐
A-Zernike Moment Based Calibration Method for Positioning Errors of Precision Motion Stages
DENG Shuchao, HU Aokang, TONG Baohong, ZHENG Jinde, WANG Lu
中国机械工程
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2026, (9): 2092
-2100
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DOI: 10.3969/j.issn.1004-132X.2026.09.002
