激光创成微结构几何精度与润湿性能的关联机制

doi:10.3969/j.issn.1004-132X.2025.07.004

摘要/Abstract

摘要： 通过对比分析不同激光脉宽制备的微结构几何精度与润湿性能，获取了微结构几何精度与润湿性能的关联规律。研究发现，减小激光脉宽有助于提高微结构的几何精度，增强表面疏水性能；皮秒激光加工在微结构底部形成了规则的乳突阵列结构，使其具有最优的疏水性能。

关键词: 微结构, 关联机制, 加工精度, 疏水性, 激光创成

Abstract: By comparing and analyzing the geometric accuracy and wettability of microstructures prepared with different laser pulse widths, the relationship between geometric accuracy and hydrophobicity was established. The results demonstrate that reducing the laser pulse width improves the geometric accuracy of microstructures and enhances their surface hydrophobicity. The picosecond-laser-fabricated microstructures with regular papillae arrays at the bottom region exhibit the optimal water-repellent properties.

Key words: microstructure, correlation mechanism, machining accuracy, hydrophobicity, laser induced

中图分类号:

TG665
TH161

倪敬1, 卢蝶1, 蒙臻1, 林少荣1, 王阳1, 傅云2. 激光创成微结构几何精度与润湿性能的关联机制[J]. 中国机械工程, 2025, 36(07): 1423-1429，1561.

NI Jing1, LU Die1, MENG Zhen1, LIN Shaorong1, WANG Yang1, FU Yun2. Correlation Mechanism between Geometric Accuracy and Wettability Performance of Laser-induced Micro-structures[J]. China Mechanical Engineering, 2025, 36(07): 1423-1429，1561.

导出引用管理器 EndNote|Ris|BibTeX

链接本文: https://www.cmemo.org.cn/CN/10.3969/j.issn.1004-132X.2025.07.004

https://www.cmemo.org.cn/CN/Y2025/V36/I07/1423

参考文献

［1］付佳俊, 刘超, 宋昕蓉, 等. 激光仿生制备超疏水碳化硅表面及功能化特性研究［J］. 中国激光, 2024, 51(20):2002204.
FU Jiajun, LIU Chao, SONG Xinrong, et al. Laser Bionic Fabrication of Superhydrophobic Silicon Carbide Surface and Investigation of Functional Properties［J］. Chinese Journal of Lasers, 2024, 51(20):2002204.
［2］TANG Mingkai, HUANG Xingjiu, YU Jingui, et al. The Effect of Textured Surfaces with Different Roughness Structures on the Tribological Properties of Al Alloy［J］. Journal of Materials Engineering and Performance, 2016, 25(10):4115-4125.
［3］牛赢, 王壮飞, 焦锋, 等. 表面微结构对材料性能影响的研究现状与展望［J］. 现代制造工程, 2023(1):146-153.
NIU Ying, WANG Zhuangfei, JIAO Feng, et al. Research Status and Prospect of the Effect of Surface Microstructure on Material Properties［J］. Modern Manufacturing Engineering, 2023(1):146-153.
［4］倪家伟, 曹自洋, 潘杰, 等. 镍钛合金表面微纳结构构建及其疏水性能研究［J］. 机床与液压, 2024, 52(4):44-49.
NI Jiawei, CAO Ziyang, PAN Jie, et al. Study on Construction of Micro-nano Structure and Hydrophobicity of Ni-ti Alloy Surface［J］. Machine Tool & Hydraulics, 2024, 52(4):44-49.
［5］李文轩, 段海涛, 李国政, 等. 激光表面织构技术调控材料摩擦学性能的研究进展［J］. 表面技术, 2024, 53(9):85-101.
LI Wenxuan, DUAN Haitao, LI Guozheng, et al. Research Progress in Controlling Material Tribological Properties by Laser Surface Texture Technology［J］. Surface Technology, 2024, 53(9):85-101.
［6］李杰, 王宇科, 石文天, 等. 激光构建超疏水表面的研究进展［J］. 化工进展, 2025, 44(3):1432-1444.
LI Jie, WANG Yuke, SHI Wentian, et al. Research Progress in Constructing Superhydrophobic Surfaces by Laser Processing［J］. Chemical Industry and Engineering Progress, 2025, 44(3):1432-1444.
［7］张茂, 易川云, 杨化雨, 等. 激光纹理化调控材料表面疏水性能研究进展［J］. 精密成形工程, 2023, 15(4):153-163.
ZHANG Mao, YI Chuanyun, YANG Huayu, et al. Research Progress on Hydrophobicity of Material Surfaces Regulated by Laser Texturing［J］. Journal of Netshape Forming Engineering, 2023, 15(4):153-163.
［8］陶海岩. 飞秒激光固体材料表面微纳结构制备及其功能特性的研究［D］. 长春:长春理工大学, 2014.
TAO Haiyan. Fabrication and Properties Researches of Femtosecond Laser Induced Micro/Nano Structures on Solid Surface［D］. Changchun:Changchun University of Science and Technology, 2014.
［9］SONG Juanjuan, WANG Deren, HU Leyong, et al. Superhydrophobic Surface Fabricated by Nanosecond Laser and Perhydropolysilazane［J］. Applied Surface Science, 2018, 455:771-779.
［10］DONG Jialin, LIU Yang, PACELLA M. Surface Texturing and Wettability Modification by Nanosecond Pulse Laser Ablation of Stainless Steels［J］. Coatings, 2024, 14(4):467.
［11］CUI Xiaobin, JIAO Yunxiu, GUO Jingxia, et al. Reconciliation and Performance of Dual-bionic Microstructure on Tool Surface［J］. International Journal of Mechanical Sciences, 2024, 282:109616.
［12］李田. 金属表面皮秒激光纹理刻蚀工艺及润湿性能研究［D］. 武汉:华中科技大学, 2017.
LI Tian. A Study on Process Technology and Surface Wettability of Picosecond Laser Texturing Metal［D］. Wuhan:Huazhong University of Science and Technology, 2017.
［13］WANG Rong, BAI Shaoxian. Influence of Laser Geometric Morphology Type on SiC Surface Wettability［J］. Science China Technological Sciences, 2016, 59(4):592-596.
［14］占彦龙, 李文, 李宏, 等. 激光微加工技术制备浸润性可控聚四氟乙烯超疏水表面［J］. 高分子材料科学与工程, 2018, 34(4):147-151.
ZHAN Yanlong, LI Wen, LI Hong, et al. Fabrication of Polytetrafluoroethylene Superhydrophobic Surface with Controllable Wettability by Laser Micromaching Technology［J］. Polymer Materials Science & Engineering, 2018, 34(4):147-151.
［15］孙集一. 纳秒激光加工铝基超疏水表面制备及性能研究［D］. 哈尔滨:哈尔滨商业大学, 2024.
SUN Jiyi. Preparation and Properties of Superhydrophobic Surface of Aluminum Processed by Nanosecond Laser［D］. Harbin:Harbin University of Commerce, 2024.
［16］HOU Shuangshuang, HOU Yanyan, XIONG Pingxin, et al. Formation of Long- and Short-periodic Nanoripples on Stainless Steel Irradiated by Femtosecond Laser Pulses［J］. Journal of Physics D:Applied Physics，2011，44：50-54.
［17］AKIR F H. Enhancing the Adhesive Bonding Strength of Ti6Al4V Sheets with Fiber Laser Texturing［J］. International Journal of Adhesion and Adhesives, 2022, 114:103117.
［18］翟帅杰. 表面织构液相辅助激光制备及摩擦性能研究［D］. 新乡:河南科技学院, 2023.
ZHAI Shuaijie. Study on Liquid-phase Assisted Laser Preparation and Friction Properties of Surface Texture［D］. Xinxiang:Henan Institute of Science and Technology, 2023.
［19］POU P, del VAL J, RIVEIRO A, et al. Laser Texturing of Stainless Steel under Different Processing Atmospheres:from Superhydrophilic to Superhydrophobic Surfaces［J］. Applied Surface Science, 2019, 475:896-905.
［20］杨丁槐. 微沟槽特性对不锈钢织构化表面摩擦特性影响研究［D］. 哈尔滨:哈尔滨工业大学, 2019.
YANG Dinghuai. Investigation of the Influence of Microgroove Property on Tribological Property of Stainless Steel Textured Surface［D］. Harbin:Harbin Institute of Technology, 2019.
［21］郑博源, 底月兰, 王海斗, 等. 激光加工制备金属基体超疏水表面的研究进展［J］. 材料导报, 2020, 34(23):23109-23120.
ZHENG Boyuan, DI Yuelan, WANG Haidou, et al. Research Progress in Preparation of Super-hydrophobic Surface of Metal Matrix by Laser Processing［J］. Materials Reports, 2020, 34(23):23109-23120
［22］陈彤. 人工髋关节表面微凹槽润湿性与减摩性研究［D］. 天津:天津理工大学, 2023.
CHEN Tong. Wettability and Anti-friction of Micro-grooves on the Surface of Artificial Hip Joint［D］. Tianjin:Tianjin University of Technology, 2023.
［23］ZHAO Wen, ZHANG Jing, YU Zhou, et al. Effects of Bioinspired Leaf Vein Structure on Biological Properties of UV Laser Patterned Titanium Alloy［J］. Surfaces and Interfaces, 2023, 38:102785.
［24］刘克, 刘子源, 陶海岩, 等. 飞秒激光制备可调控铝合金表面微沟槽结构研究［J］. 长春理工大学学报(自然科学版), 2022, 45(3):6-13.
LIU Ke, LIU Ziyuan, TAO Haiyan, et al. Research on Femtosecond Laser Fabrication of Adjustable Micro-groove Structure on Aluminum Alloy Surface［J］. Journal of Changchun University of Science and Technology (Natural Science Edition), 2022, 45(3):6-13.
［25］王广安, 章玉珠, 倪晓武, 等. 离焦量对空气中纳秒激光打孔效率的影响［J］. 中国激光, 2007, 34(12):1621-1624.
WANG Guangan, ZHANG Yuzhu, NI Xiaowu, LU Jian, et al. Effect of Deviation Distance to Focal Spot on Nanosecond-pulsed-laser Drilling Rates in Air［J］. Chinese Journal of Lasers, 2007, 34(12):1621-1624.
［26］谢明锋, 吴勇华, 闫永君, 等. 激光参数对陶瓷微孔加工质量的影响［J］. 现代制造工程, 2023(6):78-84.
XIE Mingfeng, WU Yonghua, YAN Yongjun, et al. The Influence of Picosecond Laser Processing Parameters on the Quality of Micropore Punching on Alumina Ceramic［J］. Modern Manufacturing Engineering, 2023(6):78-84.
［27］郭杨. 激光诱导微射流辅助烧蚀制备单晶碳化硅微结构研究［D］. 哈尔滨:哈尔滨工业大学, 2023.
GUO Yang. Research of Laser Induced Microjet Assisted Ablation for Microstructure Fabrication on single Crystal Silicon Carbide［D］. Harbin:Harbin Institute of Technology, 2023.
［28］汪帮富, 张永康, 王中旺, 等. 飞秒激光制备PMMA表面微结构的作用机理和润湿性研究［J］. 激光与红外, 2020, 50(9):1057-1064.
WANG Bangfu, ZHANG Yongkang, WANG Zhongwang, et al. Study on the Mechanism and Wettability of PMMA Surface Microstructure Prepared by Femtosecond Laser［J］. Laser & Infrared, 2020, 50(9):1057-1064.
［29］肖蒲庐, 陈观华, 陈宇, 等. 飞秒激光织构钛合金表面形貌及润湿性研究［J］. 中国激光, 2023, 50(16):1602208.
XIAO Pulu, CHEN Guanhua, CHEN Yu, et al. Morphology and Wettability of Titanium Alloy Surface Textured by Femtosecond Laser［J］. Chinese Journal of Lasers, 2023, 50(16):1602208.
［30］何婉盈, 姚鹏, 褚东凯, 等. 钛表面微凹凸织构的激光加工及其细胞黏附研究［J］. 中国激光, 2022, 49(10):1002605.
HE Wanying, YAO Peng, CHU Dongkai, et al. Fabrication and Cell-adhesion Evaluation of Laser-Ablated Microprotrusion or Microgroove on Titanium［J］. Chinese Journal of Lasers, 2022, 49(10):1002605.
［31］王鹏飞. 模具表面微织构的激光加工及其摩擦磨损性能研究［D］. 济南:山东大学, 2023.
WANG Pengfei. Friction and Wear Properties of Laser Processed Micro-textured Die Surfaces［D］. Jinan:Shandong University, 2023.
［32］BRANDON S, HAIMOVICH N, YEGER E, et al. Partial Wetting of Chemically Patterned Surfaces:the Effect of Drop Size［J］. Journal of Colloid and Interface Science, 2003, 263(1):237-243.
［33］李元可, 魏昕, 汪永超, 等. 皮秒激光加工工艺对微沟槽表面的疏水性研究［J］. 激光技术, 2022, 46(3):301-306.
LI Yuanke, WEI Xin, WANG Yongchao, et al. Study on Hydrophobicity of Micro-groove Surface by Picosecond Laser Processing［J］. Laser Technology, 2022, 46(3):301-306.
［34］郭永刚, 吴云飞, 朱东坡, 等. 织构几何参数对超疏水钛合金表面润湿性的影响［J］. 表面技术, 2024, 53(22):180-190.
GUO Yonggang, WU Yunfei, ZHU Dongpo, et al. Effect of Texture Geometric Parameters on Wettability of Superhydrophobic Titanium Alloy Surface［J］. Surface Technology, 2024, 53(22):180-190.
［35］曹祥康, 孙晓光, 蔡光义, 等. 耐久型超疏水表面:理论模型、制备策略和评价方法［J］. 化学进展, 2021, 33(9):1525-1537.
CAO Xiangkang, SUN Xiaoguang, CAI Guangyi, et al. Durable Superhydrophobic Surfaces:Theoretical Models, Preparation Strategies, and Evaluation Methods［J］. Progress in Chemistry, 2021, 33(9):1525-1537.

[1]	宜亚丽1, 2, 程阳洋2, 陈晓卫2, 陈一凡2, 张振东2, 金贺荣1, 2. 基于最大刚度原则的铣削机器人位姿确定方法[J]. 中国机械工程, 2025, 36(07): 1544-1552.
[2]	吴蒙华1, 姜炳春1, 肖雨晴2, 贾卫平2. 磁场对无掩模定域性电沉积增材制造三维微结构生长模式的影响[J]. 中国机械工程, 2024, 35(11): 2035-2042.
[3]	王陈, 赵建社, 强智明, 张昌昊, 柳世豪, . 振动进给对表面小微结构电解加工流场的影响[J]. 中国机械工程, 2023, 34(10): 1191-1198.
[4]	周丹砚, 黄汉雄, 罗杜宇. 双级微结构对柔性压力传感器性能的提升[J]. 中国机械工程, 2023, 34(06): 720-726.
[5]	赵重阳, 陆俊宇, 王晓博, 赵波. 超声纵扭辅助铣削高强铝合金表面润湿性能研究[J]. 中国机械工程, 2022, 33(16): 1912-1918，1927.
[6]	易茜, 李聪波, 潘建, 张友. 薄板类零件加工精度可靠性分析及工艺参数优化[J]. 中国机械工程, 2022, 33(11): 1269-1277.
[7]	药芳萍, 黎相孟, 石强盛杰, 张潇. 石墨烯-聚合物柔性电容传感器制备及性能研究[J]. 中国机械工程, 2021, 32(24): 2909-2914.
[8]	潘承怡, 童圆栖, 曹冠群, 赵彦玲. 微结构表面展开轮摩擦磨损特性与仿真研究[J]. 中国机械工程, 2021, 32(22): 2689-2696.
[9]	张横, 丁晓红, 沈磊, 徐世鹏. 考虑连接性的三明治阻尼复合结构拓扑优化设计[J]. 中国机械工程, 2021, 32(20): 2403-2410.
[10]	鲁艳军;陈福民;伍晓宇;周超兰. 微结构模芯的精密磨削及其在微注塑成形中应用[J]. 中国机械工程, 2020, 31(11): 1270-1276,1284.
[11]	雷鹏福;戴宁;汪志鹏;陈为;黄仁凯. 功能性微结构可控参数建模技术研究[J]. 中国机械工程, 2020, 31(05): 553-560.
[12]	吕俊杰;倪敬;蒙臻;任旭;冯凯;俞虹飞;王艺蒙. 拉刀刀尖表面微结构单点金刚石刀具制备及降载机制[J]. 中国机械工程, 2020, 31(04): 390-395,402.
[13]	喻长江;戴宁;李大伟;程筱胜. 多级仿生建模及优化技术[J]. 中国机械工程, 2019, 30(09): 1111-1118.
[14]	赵建社, 李龙, 王峰, 肖雄. 振动进给对微尺度群缝电解加工过程的影响[J]. 中国机械工程, 2015, 26(1): 44-48,78.
[15]	姜欣, 刘玉红, 宋诗军, 王延辉. 垂直微结构剖面仪主体结构优化[J]. 中国机械工程, 2015, 26(1): 97-101.