激光直接成像机靶标识别算法的设计及抗扰性能测试

doi:10.3969/j.issn.1004-132X.2025.07.025

中国机械工程 ›› 2025, Vol. 36 ›› Issue (07): 1624-1635.DOI: 10.3969/j.issn.1004-132X.2025.07.025

激光直接成像机靶标识别算法的设计及抗扰性能测试

王瑞洲¹*;张宇龙¹;王华²;张宪民³

1.广东工业大学省部共建精密电子制造技术与装备国家重点实验室，广州，510006
2.广东科视光学技术股份有限公司广东省数字光刻工程技术研究中心，东莞，523000
3.华南理工大学广东省精密装备与制造技术重点实验室，广州，510641

出版日期:2025-07-25 发布日期:2025-09-04
作者简介:王瑞洲*，男，1990年生，副教授。研究方向为柔顺机构、微纳定位与运动控制、微视觉。发表论文30余篇。E-mail:wangrz@gdut.edu.cn。
基金资助:
国家自然科学基金（U24A20108）；广东省自然科学基金（2025A1515011189）；江西省赣鄱英才计划（jxkjcytd2024001）；广州市基础与应用基础研究项目（202201010398）

Design and Anti-disturbance Performance Tests of Target Recognition Algorithm for LDI Machines

WANG Ruizhou¹*;ZHANG Yulong¹;WANG Hua²;ZHANG Xianmin³

1.State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,
Guangdong University of Technology,Guangzhou,510006
2.Guangdong Provincial Engineering Technology Research Center of Digital Lithography,
Guangdong KST Optical Co.,Ltd.,Dongguan,Guangdong,523000
3.Guangdong Provincial Key Laboratory of Precision Equipment and Manufacture Technology,
South China University of Technology,Guangzhou,510641

Online:2025-07-25 Published:2025-09-04

摘要/Abstract

摘要： 在激光直接成像领域，扰动导致靶标识别性能劣化，降低寻靶对位精度及效率。设计了激光直接成像(LDI)机视觉寻靶装置，提出了随机一点与随机三点自适应切换的取点求圆策略，采用随机抽样一致方法完成再拟合，并设计了靶标识别算法。分析了扰动源的生成机理，设计了光照条件与离面位移可控的量化激励装置。加工了包含典型靶标异常特征的基板，搭建了LDI机扰动源的可控量化生成与测试系统。测试结果表明，LDI机靶标识别算法的抗扰动性能较强。

关键词: 激光直接成像, 靶标识别算法, 抗扰性能, 离面位移

Abstract: In LDI fields, disturbances caused the degradation of target recognition performance, and reduced the accuracy and efficiency of target alignment. A visual targeting device for LDI machines was designed. An adaptive point-selecting circle-searching strategy of random one point and random three points was proposed. The re-fitting was completed using the random sample consensus(RANSAC) method, and a target recognition algorithm was designed. The formation mechanism of disturbances was analyzed. A controllable and quantitative generation device for illumination conditions and out-of-focused-plane displacements was designed. The substrates containing typical targets with anomaly characteristics were fabricated. A quantitative generation and test system for the disturbances of LDI machines was completed. Test results demonstrate that the proposed target recognition algorithm for LDI machines possesses strong robustness against disturbances.

Key words: laser direct imaging(LDI), target recognition algorithm, anti-disturbance performance, out-of-focused-plane displacement

中图分类号:

TH744
TP23

王瑞洲1, 张宇龙1, 王华2, 张宪民3. 激光直接成像机靶标识别算法的设计及抗扰性能测试[J]. 中国机械工程, 2025, 36(07): 1624-1635.

WANG Ruizhou1, ZHANG Yulong1, WANG Hua2, ZHANG Xianmin3. Design and Anti-disturbance Performance Tests of Target Recognition Algorithm for LDI Machines[J]. China Mechanical Engineering, 2025, 36(07): 1624-1635.

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链接本文: https://www.cmemo.org.cn/CN/10.3969/j.issn.1004-132X.2025.07.025

https://www.cmemo.org.cn/CN/Y2025/V36/I07/1624

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激光直接成像机靶标识别算法的设计及抗扰性能测试

Design and Anti-disturbance Performance Tests of Target Recognition Algorithm for LDI Machines

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